Advanced measurement procedure for interferometric microscope for three-dimensional imaging of complex surfaces using two-wavelength interferometry and reference arm attenuation
Date
2020
Journal Title
Journal ISSN
Volume Title
Publisher
IFSA Publishing, S.L.
Abstract
Description
Subject(s)
microscope, interferometry, phase shifting, Bragg cell, acousto-optic modulator, multiwavelength interferometry, high dynamic range
Citation
Item identifier
ISSN
2306-8515