Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

Date
2021
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Institute of Physics, Polish Academy of Sciences
Abstract
Description
Subject(s)
gradient refractive-index layers, silicon oxynitride, dual ion beam sputtering, precision of optical characterization
Citation
Item identifier
https://dspace.tul.cz/handle/15240/162301
 https://doi.org/10.12693/aphyspola.140.215
ISSN
0587-4246
ISBN
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