Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

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dc.contributor.authorKanclíř Vítcs
dc.contributor.authorŽídek Karelcs
dc.contributor.authorVáclavík Jancs
dc.date.accessioned2022-01-29T19:04:33Z
dc.date.available05-20-2021en
dc.date.available2022-01-29T19:04:33Z
dc.date.issued2021cs
dc.format.extent7cs
dc.identifier.doi10.12693/aphyspola.140.215
dc.identifier.issn0587-4246cs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/162301
dc.language.isoengcs
dc.publisherInstitute of Physics, Polish Academy of Sciencescs
dc.relation.ispartofActa Physica Polonica Aen
dc.relation.ispartofseries1cs
dc.relation.urihttp://przyrbwn.icm.edu.pl/APP/PDF/140/app140z3p04.pdfcs
dc.subjectgradient refractive-index layerscs
dc.subjectsilicon oxynitridecs
dc.subjectdual ion beam sputteringcs
dc.subjectprecision of optical characterizationcs
dc.titlePrecision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterizationen
dc.titlePrecision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterizationcs
local.citation.epage215-221cs
local.citation.spage215-221cs
local.identifier.publikace8998
local.relation.issue3cs
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