Bulk and interface second harmonic generation in the Si3N4 thin films deposited via ion beam sputtering

Date
2021
Journal Title
Journal ISSN
Volume Title
Publisher
IOP PUBLISHING LTD
Abstract
Description
Subject(s)
bulk, ellipsometry, interface, second harmonic generation (SHG), silicon nitride, thin films
Citation
ISSN
2040-8978
ISBN
Collections