Bulk and interface second harmonic generation in the Si3N4 thin films deposited via ion beam sputtering
Date
2021-01-01
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
IOP PUBLISHING LTD
Abstract
Description
Subject(s)
bulk, ellipsometry, interface, second harmonic generation (SHG), silicon nitride, thin films
Citation
ISSN
2040-8978