Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method

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dc.contributor.authorBatory Damiancs
dc.contributor.authorJedrzejczak Annacs
dc.contributor.authorSzymanski W.cs
dc.contributor.authorNiedzielski Piotrcs
dc.contributor.authorFijalkowski Mateuszcs
dc.contributor.authorLouda Petrcs
dc.contributor.authorKotela Ireneuszcs
dc.contributor.authorHromadka Martincs
dc.contributor.authorMusil Jindřichcs
dc.date.accessioned2018-09-25T11:58:09Z
dc.date.available2018-09-25T11:58:09Z
dc.date.issued2015cs
dc.format.extent7cs
dc.identifier.doi10.1016/j.tsf.2015.08.017
dc.identifier.issn0040-6090cs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/28704
dc.language.isoengcs
dc.publisherELSEVIER SCIENCE SA,cs
dc.publisher.cityPO BOX 564, 1001 LAUSANNE, SWITZERLANDcs
dc.relation.ispartofseries1cs
dc.relation.urihttp://www.sciencedirect.comcs
dc.subjectDiamond-like carboncs
dc.subjectSiliconcs
dc.subjectRadio-Frequency Plasma-Assisted Chemical Vapour Depositioncs
dc.subjectStresscs
dc.titleMechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition methodcs
local.citation.epage299-305cs
local.citation.spage299-305cs
local.identifier.publikace2099
local.identifier.wok000361057100045en
local.relation.issueSEP 1cs
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