Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method
Date
2015
Journal Title
Journal ISSN
Volume Title
Publisher
ELSEVIER SCIENCE SA,
Abstract
Description
Subject(s)
Diamond-like carbon, Silicon, Radio-Frequency Plasma-Assisted Chemical Vapour Deposition, Stress
Citation
ISSN
0040-6090