dc.contributor.author	Volfová, Lenka
dc.date	2016
dc.date.accessioned	2017-04-21
dc.date.available	2017-04-21
dc.date.defense	2016-06-22
dc.date.issued	2015
dc.degree.level	Ph.D.
dc.description	CD ROM	cs
dc.description.abstract	This thesis deals with thin layers deposition on porous substrates by the PECVD method. Active particles diffusion is one of the most significant factors influencing the homogeneity of thin layers created on spatially complicated substrates during plasmatic process. One of the main purposes of this thesis was the research of the particles' penetration into the spaces shielded from the direct exposure to the plasma. The measurement methodology was designed and a model substrate was built to allow the measurements of fluidity of thin films within different shade areas. Another purpose of the test was study of the influence of the precursor molecules' size on the diffusion during the process of thin film deposition. Therefore two precursors with significantly different molecular weights acetylene and TTIP were used for the layer formation. The demonstrated effect was supported by the results of a mathematical model, based on the parameters of the process. Its very good conformity with the measured results indicates the possibility of prediction of behavior during PECVD process. Good compatibility with computer simulation has been demonstrated in the case of formation of a layer on the textile fabric of cotton, basalt and glass fibers. The layers formed on technical fabrics from basalt and glass fibers proved the photocatalytic activity. This confirmed the prospects of textile substrates for coating by TiO2 layeres due to the large surface area of textile materials.	en
dc.format	text
dc.identifier.signature	U 921 S
dc.identifier.uri	https://dspace.tul.cz/handle/15240/20094
dc.language.iso	cs
dc.publisher	Technická Univerzita v Liberci	cs
dc.relation.isreferencedby	http://knihovna-opac.tul.cz/diplomovaPrace.php?id_dipl=34019&typ=1
dc.relation.isreferencedby	http://knihovna-opac.tul.cz/diplomovaPrace.php?id_dipl=34019&typ=2
dc.relation.isreferencedby	http://knihovna-opac.tul.cz/diplomovaPrace.php?id_dipl=34019&typ=3
dc.rights	Vysokoškolská závěrečná práce je autorské dílo chráněné dle zákona č. 121/2000 Sb., autorský zákon, ve znění pozdějších předpisů. Je možné pořizovat z něj na své náklady a pro svoji osobní potřebu výpisy, opisy a rozmnoženiny. Jeho využití musí být v souladu s autorským zákonem https://www.mkcr.cz/assets/autorske-pravo/01-3982006.pdf a citační etikou https://knihovna.tul.cz/document/398	cs
dc.rights	A university thesis is a work protected by the Copyright Act. Extracts, copies and transcripts of the thesis are allowed for personal use only and at one?s own expense. The use of thesis should be in compliance with the Copyright Act. https://www.mkcr.cz/assets/autorske-pravo/01-3982006.pdf and the citation ethics https://knihovna.tul.cz/document/398	en
dc.rights.uri	https://knihovna.tul.cz/document/26
dc.rights.uri	https://www.mkcr.cz/assets/autorske-pravo/01-3982006.pdf
dc.source.uri	http://knihovna-opac.tul.cz/diplomovaPrace.php?id_dipl=34019
dc.title	Vliv difúze na PECVD funkčních vrstev	cs
dc.title.alternative	Influence of Diffusion on PECVD of Functional Layers	en
dc.type	Thesis
dc.type	disertační práce	cs
local.department	KMT	cs
local.faculty	Fakulta strojní	cs
local.identifier.stag	34019
local.identifier.verbis	524195
local.note.administrators	TrykarovaA

Vliv difúze na PECVD funkčních vrstev

Title Alternative:Influence of Diffusion on PECVD of Functional Layers

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