The Effect of Deposition of Metal Charge Compensation Coating on Surface Morfology of Samples for SEM

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dc.contributor.authorAndršová Zuzanacs
dc.contributor.authorKejzlar Pavelcs
dc.contributor.authorVoleský Lukášcs
dc.contributor.authorPetrů Michalcs
dc.date.accessioned2020-06-08T09:35:41Z
dc.date.available16-04-2019en
dc.date.available2020-06-08T09:35:41Z
dc.date.issued2018-01-01cs
dc.date.updated15-11-2019en
dc.format.extent6cs
dc.identifier.isbn978-80-87294-81-9cs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/155284
dc.language.isoengcs
dc.publisherTANGER Ltdcs
dc.publisher.cityOstravacs
dc.relation.ispartof(2018) NANOCON 2017 - Conference Proceedings, 9th International Conference on Nanomaterials - Research and Applicationen
dc.relation.ispartofseries1cs
dc.riv.kontrolni-cislo192065082cs
dc.riv.kontrolni-cislo192065671cs
dc.riv.specifikaceRIV/46747885:24210/18:00005873!RIV19-MSM-24210___cs
dc.riv.specifikaceRIV/46747885:24620/18:00005873!RIV19-MSM-24620___cs
dc.subjectAtomic force microscopycs
dc.subjectCrystal atomic structurecs
dc.subjectDepositioncs
dc.subjectGold coatingscs
dc.subjectNanostructured materialscs
dc.subjectSilicon waferscs
dc.subjectCharge compensationcs
dc.subjectCoating materialcs
dc.subjectConductive surfacescs
dc.subjectDeposition of metalscs
dc.subjectDeposition Parameterscs
dc.subjectMagnetic sputteringcs
dc.subjectQuantitacs
dc.titleThe Effect of Deposition of Metal Charge Compensation Coating on Surface Morfology of Samples for SEMcs
local.citation.epage848-853cs
local.citation.spage848-853cs
local.event.locationBrnoen
local.identifier.publikace5873
local.identifier.wok452823300141en
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