Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method
Date
2019-01-01
Journal Title
Journal ISSN
Volume Title
Publisher
Springer New York LLC
Abstract
Description
Subject(s)
cathodic arc deposition, nanohardness, TiCN coatings, XRD analysis
Citation
ISSN
1059-9495