Influence of Bias Voltage and CH4/N2 Gas Ratio on the Structure and Mechanical Properties of TiCN Coatings Deposited by Cathodic Arc Deposition Method
Date
2019
Journal Title
Journal ISSN
Volume Title
Publisher
Springer New York LLC
Abstract
Description
Subject(s)
cathodic arc deposition, nanohardness, TiCN coatings, XRD analysis
Citation
ISSN
1059-9495