Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

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dc.contributor.authorKredba Jancs
dc.contributor.authorStašík Marekcs
dc.contributor.authorMach Marekcs
dc.contributor.authorKarabyn Vasylcs
dc.contributor.authorMatoušek Ondřejcs
dc.date.accessioned2021-01-14T18:07:48Z
dc.date.available03-23-2021en
dc.date.available2021-01-14T18:07:48Z
dc.date.issued2020cs
dc.date.updated07-44-2021en
dc.format.extent7cs
dc.identifier.doi10.1117/12.2568732
dc.identifier.isbn9781510637863cs
dc.identifier.issn0277786Xcs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/158726
dc.language.isoengcs
dc.publisherSPIEcs
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineering, Interferometry XXen
dc.relation.ispartofseries1cs
dc.relation.urihttps://doi.org/10.1117/12.2568732cs
dc.subjectfrequency-tuned interferometrycs
dc.subjectphase-shifting interferometrycs
dc.subjectFourier transformcs
dc.subjectDFB diodescs
dc.subjectsurfacetopography measurementcs
dc.subjectghost fringescs
dc.titleSurface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometryen
dc.titleSurface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometrycs
local.event.locationOnline Only, United Statesen
local.identifier.publikace8053
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