Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Date
2020
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
SPIE
Abstract
Description
Subject(s)
frequency-tuned interferometry, phase-shifting interferometry, Fourier transform, DFB diodes, surfacetopography measurement, ghost fringes
Citation
Item identifier
https://dspace.tul.cz/handle/15240/158726
 https://doi.org/10.1117/12.2568732
ISSN
0277786X
ISBN
9781510637863
Collections