Thin SiNC/SiOC Coatings with a Gradient of Refractive Index Deposited from Organosilicon Precursor

Date
2020-01-01
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Abstract
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Subject(s)
thin films, silicon carbon-nitride, silicone carbon-oxide, PECVD method, inhomogeneous optical filters, gradient interference filters, organosilicon precursors
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https://dspace.tul.cz/handle/15240/158432
 https://doi.org/doi:10.3390/coatings10080794
ISSN
2079-6412
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