Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties
dc.contributor.author | Bakalova Totka | cs |
dc.contributor.author | Petkov Nikolay | cs |
dc.contributor.author | Cholakova Tetiana | cs |
dc.contributor.author | Voleský Lukáš | cs |
dc.date.accessioned | 2018-09-25T11:46:49Z | |
dc.date.available | 2018-09-25T11:46:49Z | |
dc.date.issued | 2016-01-01 | cs |
dc.format.extent | 4 | cs |
dc.identifier.issn | 1310-8271 | cs |
dc.identifier.uri | https://dspace.tul.cz/handle/15240/27140 | |
dc.language.iso | eng | cs |
dc.publisher | Technical University - Sofia, Plovdiv branch, Bulgaria | cs |
dc.publisher.city | Plovdiv | cs |
dc.relation.ispartofseries | 0 | cs |
dc.relation.uri | http://techsys.tu-plovdiv.bg/en/ | cs |
dc.subject | reactive magnetron sputtering | cs |
dc.subject | AlN thin films | cs |
dc.subject | mechanical properties | cs |
dc.subject | tribological properties | cs |
dc.title | Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties | cs |
local.citation.epage | 252-255 | cs |
local.citation.spage | 252-255 | cs |
local.identifier.publikace | 439 |