Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties

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dc.contributor.authorBakalova Totkacs
dc.contributor.authorPetkov Nikolaycs
dc.contributor.authorCholakova Tetianacs
dc.contributor.authorVoleský Lukášcs
dc.date.accessioned2018-09-25T11:46:49Z
dc.date.available2018-09-25T11:46:49Z
dc.date.issued2016cs
dc.format.extent4cs
dc.identifier.issn1310-8271cs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/27140
dc.language.isoengcs
dc.publisherTechnical University - Sofia, Plovdiv branch, Bulgariacs
dc.publisher.cityPlovdivcs
dc.relation.ispartofseries0cs
dc.relation.urihttp://techsys.tu-plovdiv.bg/en/cs
dc.subjectreactive magnetron sputteringcs
dc.subjectAlN thin filmscs
dc.subjectmechanical propertiescs
dc.subjecttribological propertiescs
dc.titleReactive Magnetron Sputtering of AlN Hard Films and Tribological Propertiescs
local.citation.epage252-255cs
local.citation.spage252-255cs
local.identifier.publikace439
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