Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties

Date
2016
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Technical University - Sofia, Plovdiv branch, Bulgaria
Abstract
Description
Subject(s)
reactive magnetron sputtering, AlN thin films, mechanical properties, tribological properties
Citation
Item identifier
https://dspace.tul.cz/handle/15240/27140
ISSN
1310-8271
ISBN
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