Browsing by Author "Zich, Ladislav"
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- ItemOptimalizace plazmochemického nanášení tenkých vrstev za atmosférických podmínek(Technická Univerzita v Liberci, 2010) Zich, Ladislav; Kolouch, AlešThe aim of my diploma thesis is design and build a device for deposition of larger area thin films under atmospheric pressure. First part includes an overwiev of plasma discharges, methods of plasma thin films deposition a properties of titanium dioxide films. In the experimental part I designed the device for large area thin films deposition, built it and optimized conditions for deposition of TiOx thin films. In the last part I evaluated properties of deposited thin films.