Deposition of AlCN thin films by reactive DC magnetron sputtering and tribology

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dc.contributor.authorBakalova Totkacs
dc.date.accessioned2018-09-25T11:46:48Z
dc.date.available2018-09-25T11:46:48Z
dc.date.issued2016-01-01cs
dc.format.extent4cs
dc.identifier.issn1310-8271cs
dc.identifier.urihttps://dspace.tul.cz/handle/15240/27138
dc.language.isoengcs
dc.publisherTechnical University - Sofia, Plovdiv Branchcs
dc.relation.ispartofseries0cs
dc.relation.urihttp://techsys.tu-plovdiv.bg/en/cs
dc.subjectthin filmscs
dc.subjectmagnetron sputteringcs
dc.subjecttribologycs
dc.subjectcoefficient of frictioncs
dc.subjectwearcs
dc.titleDeposition of AlCN thin films by reactive DC magnetron sputtering and tribologycs
local.citation.epage145-148cs
local.citation.spage145-148cs
local.identifier.publikace437
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