Concept of a polishing tool based on viscoelastic properties for midspatial frequencies suppression on aspheric surfaces
Date
2019
Journal Title
Journal ISSN
Volume Title
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Abstract
Description
Subject(s)
midspatial frequency suppression, viscoelastic polishing tool, viscoelastic properties analysis
Citation
ISSN
0091-3286