Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-Based Visual Tracking
Date
2015
Journal Title
Journal ISSN
Volume Title
Publisher
Trans Tech Publications Ltd
Abstract
Description
Subject(s)
Microassembly, Microrobotic automation, Micro-object tracking, MEMS visual servoing
Citation
ISSN
1660-9336
ISBN
978-3-03835-202-0