Browsing by Author "Pfeifer, Jan"
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- ItemHodnocení tloušťky vrstvy a morfologie v závislosti na času depozice(Technická Univerzita v Liberci, 2010) Pfeifer, Jan; Hájková, PavlínaThe aim of the baccalaurean thesis was the research the deposition of thin layers by the plasma enhanced-chemical vapour deposition (PECVD) method and the measurement of their morphology. Layers were deposed by PECVD method with the changes of the deposition parameters, with the emphasis on the deposition times. The morphology of the surface and the thickness of those deposing layers were ascertained. At the end the conclusions concerning the coherence between the deposing parameters and the characteristics of the layers were made.